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Технология полупроводниковых приборов и изделий микроэлектроники 8. Литографические процессы, V. F. Martynov, T. E. Bazarova
- Language
- Released
- 1989
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- (Paperback)
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- Title
- Технология полупроводниковых приборов и изделий микроэлектроники 8. Литографические процессы
- Language
- Russian
- Authors
- V. F. Martynov, T. E. Bazarova
- Publisher
- Vysšaja Škola
- Released
- 1989
- Format
- Paperback
- ISBN10
- 5060010805
- ISBN13
- 9785060010800
- Series