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Diffusion Phenomena in the Chemically Amplified CARL® Resist System
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Diffusion Phenomena in the Chemically Amplified CARL® Resist System, Ernst-Christian Richter
- Language
- Released
- 2022
- Binding
- (Paperback)
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- Title
- Diffusion Phenomena in the Chemically Amplified CARL® Resist System
- Subtitle
- DE
- Language
- German
- Authors
- Ernst-Christian Richter
- Publisher
- utzverlag GmbH
- Released
- 2022
- Format
- Paperback
- Pages
- 88
- ISBN13
- 9783831686353
- Series
- Description
- Diffusion Phenomena in the Chemically Amplified CARL® Resist System