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Simulation of Semiconductor Processes and Devices 1998

SISPAD 98

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  • 424 pages
  • 15 hours of reading

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This volume contains the proceedings of the 1998 International Conference on Simulation of Semiconductor Processes and Devices and provides an open forum for the presentation of the latest results and trends in modeling and simulation of semiconductor equipment, processes and devices. Topics • semiconductor equipment simulation • process modeling and simulation • device modeling and simulation of complex structures • interconnect modeling • integrated systems for process, device, circuit simulation and optimisation • numerical methods and algorithms • compact modeling and parameter extraction • modeling for RF applications • simulation and modeling of new devices (heterojunction based, SET’s, quantum effect devices, laser based ...)

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Simulation of Semiconductor Processes and Devices 1998, Kristin De Meyer, Serge Biesemans

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Released
1998
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Title
Simulation of Semiconductor Processes and Devices 1998
Subtitle
SISPAD 98
Language
English
Publisher
Springer
Released
1998
Format
Hardcover
Pages
424
ISBN10
3211832084
ISBN13
9783211832080
Series
Description
This volume contains the proceedings of the 1998 International Conference on Simulation of Semiconductor Processes and Devices and provides an open forum for the presentation of the latest results and trends in modeling and simulation of semiconductor equipment, processes and devices. Topics • semiconductor equipment simulation • process modeling and simulation • device modeling and simulation of complex structures • interconnect modeling • integrated systems for process, device, circuit simulation and optimisation • numerical methods and algorithms • compact modeling and parameter extraction • modeling for RF applications • simulation and modeling of new devices (heterojunction based, SET’s, quantum effect devices, laser based ...)