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- Title
- Silicon Processing for the VLSI Era. Volume 1
- Subtitle
- Process technology
- Language
- English
- Authors
- Stanley Wolf, Richard N. Tauber
- Publisher
- Lattice Press
- Released
- 1999
- Format
- Hardcover
- Pages
- 890
- ISBN10
- 0961672161
- ISBN13
- 9780961672164
- Series
- Rating
- 4 out of 5


