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Semiconductor Sensors

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An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.

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Semiconductor Sensors, Simon M. Sze

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Released
1994
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(Hardcover)
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Title
Semiconductor Sensors
Language
English
Released
1994
Format
Hardcover
Pages
576
ISBN10
0471546097
ISBN13
9780471546092
Series
Rating
5 out of 5
Description
An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.