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Fundamentals of microfabrication and nanotechnology III

From MEMS to bio-MEMS and bio-NEMS

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Fundamentals of microfabrication and nanotechnology III, Marc J. Madou

Language
Released
2012,
Book condition
Good
Price
€145.99

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Title
Fundamentals of microfabrication and nanotechnology III
Subtitle
From MEMS to bio-MEMS and bio-NEMS
Language
English
Publisher
CRC Press
Released
2012
ISBN10
142005516X
ISBN13
9781420055160
Series