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Semiconductor Materials and Process Technology Handbook

For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI)

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This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.

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Semiconductor Materials and Process Technology Handbook, Gary E. McGuire

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Released
1988
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(Hardcover)
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Title
Semiconductor Materials and Process Technology Handbook
Subtitle
For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI)
Language
English
Released
1988
Format
Hardcover
Pages
688
ISBN10
0815511507
ISBN13
9780815511502
Series
Description
This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.