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Modelling of microfabrication systems
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First book on modelling of the processing techniques for microsystems Focusses on the fabrication of high-aspect ratio microparts, namely ion beam micromachining, x-ray lithography, laser chemical vapor deposition, laser photopolimerization, laser ablation Includes supplementary material: sn. pub/extras
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Modelling of microfabrication systems, Raja Nassar
- Language
- Released
- 2003
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- Title
- Modelling of microfabrication systems
- Language
- English
- Authors
- Raja Nassar
- Publisher
- Springer
- Released
- 2003
- ISBN10
- 3540002529
- ISBN13
- 9783540002529
- Series
- Physics and astronomy online library
- Category
- Technology / Engineering
- Description
- First book on modelling of the processing techniques for microsystems Focusses on the fabrication of high-aspect ratio microparts, namely ion beam micromachining, x-ray lithography, laser chemical vapor deposition, laser photopolimerization, laser ablation Includes supplementary material: sn. pub/extras