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Active electrostatic MEMS bearing for inertial sensing applications
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Active electrostatic MEMS bearing for inertial sensing applications, Stéphane Kühne
- Language
- Released
- 2012
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- Title
- Active electrostatic MEMS bearing for inertial sensing applications
- Language
- English
- Authors
- Stéphane Kühne
- Publisher
- Der Andere Verl.
- Released
- 2012
- ISBN10
- 3862473163
- ISBN13
- 9783862473168
- Series
- Scientific reports on micro and nanosystems
- Category
- University and college textbooks