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Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon
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Focusing on the innovative micro-mechanical Fabry-Perot optical filter, this work introduces a novel structure that integrates easily with low-cost silicon photodetectors and transistors. The design features a movable gold-coated oxide cantilever as the top mirror and a stationary silicon bottom mirror, utilizing a simple fabrication process. Experimental results demonstrate significant wavelength tuning capabilities and promising modulation bandwidths. The study also highlights potential enhancements in mirror characteristics that could further improve performance.
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Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon, James Patterson
- Language
- Released
- 2013
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- Title
- Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon
- Language
- English
- Authors
- James Patterson
- Publisher
- Creative Media Partners, LLC
- Released
- 2013
- Format
- Paperback
- Pages
- 110
- ISBN13
- 9781288916313
- Category
- Pedagogy
- Description
- Focusing on the innovative micro-mechanical Fabry-Perot optical filter, this work introduces a novel structure that integrates easily with low-cost silicon photodetectors and transistors. The design features a movable gold-coated oxide cantilever as the top mirror and a stationary silicon bottom mirror, utilizing a simple fabrication process. Experimental results demonstrate significant wavelength tuning capabilities and promising modulation bandwidths. The study also highlights potential enhancements in mirror characteristics that could further improve performance.