Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon

Focusing on the innovative micro-mechanical Fabry-Perot optical filter, this work introduces a novel structure that integrates easily with low-cost silicon photodetectors and transistors. The design features a movable gold-coated oxide cantilever as the top mirror and a stationary silicon bottom mirror, utilizing a simple fabrication process. Experimental results demonstrate significant wavelength tuning capabilities and promising modulation bandwidths. The study also highlights potential enhancements in mirror characteristics that could further improve performance.