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Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon

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110 pages
Reading time
4 hours

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Focusing on the innovative micro-mechanical Fabry-Perot optical filter, this work introduces a novel structure that integrates easily with low-cost silicon photodetectors and transistors. The design features a movable gold-coated oxide cantilever as the top mirror and a stationary silicon bottom mirror, utilizing a simple fabrication process. Experimental results demonstrate significant wavelength tuning capabilities and promising modulation bandwidths. The study also highlights potential enhancements in mirror characteristics that could further improve performance.

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Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon, James Patterson

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Released
2013
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