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Numerische Modelle zur Prozesssimulation und Magnetfeldberechnung im Magnetron-Sputter-Ion-Plating-Physical-Vapour-Deposition-Verfahren

Numerische Modelle zur Prozesssimulation und Magnetfeldberechnung im Magnetron-Sputter-Ion-Plating-Physical-Vapour-Deposition-Verfahren

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