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Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
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Scanning electron microscopy, Ludwig Reimer
- Language
- Released
- 1998
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- Title
- Scanning electron microscopy
- Language
- English
- Authors
- Ludwig Reimer
- Publisher
- Springer
- Released
- 1998
- ISBN10
- 3540639764
- ISBN13
- 9783540639763
- Category
- Physics
- Description
- Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.