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Etching in microsystem technology
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Explaining the scientific fundamentals of etching processes which occupy a key position in microfabrication this work is a practical guide for etching processes. The practical section is set out like a cookery book: it gives recipes for many etching processes and helps to produce perfect microstructures.
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Etching in microsystem technology, Michael Köhler
- Language
- Released
- 1999
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- Title
- Etching in microsystem technology
- Language
- English
- Authors
- Michael Köhler
- Publisher
- Wiley-VCH
- Released
- 1999
- ISBN10
- 3527295615
- ISBN13
- 9783527295616
- Category
- Technology / Engineering
- Description
- Explaining the scientific fundamentals of etching processes which occupy a key position in microfabrication this work is a practical guide for etching processes. The practical section is set out like a cookery book: it gives recipes for many etching processes and helps to produce perfect microstructures.