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Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films
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Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films, Stanislav Mráz
- Language
- Released
- 2006
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- Title
- Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films
- Language
- English
- Authors
- Stanislav Mráz
- Publisher
- Shaker
- Released
- 2006
- Format
- Paperback
- ISBN10
- 3832255222
- ISBN13
- 9783832255220
- Category
- University and college textbooks