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Multicompliant MEMS for measurement of adhesion energies and pull-off forces in an electrostatic bearing
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Multicompliant MEMS for measurement of adhesion energies and pull-off forces in an electrostatic bearing, Daniel Oliver Bachmann
- Language
- Released
- 2007
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- (Paperback)
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- Title
- Multicompliant MEMS for measurement of adhesion energies and pull-off forces in an electrostatic bearing
- Language
- English
- Authors
- Daniel Oliver Bachmann
- Publisher
- Der Andere Verl.
- Released
- 2007
- Format
- Paperback
- ISBN10
- 3899596188
- ISBN13
- 9783899596182
- Category
- Physics