Modeling and active vibration control of a linkage structure in a scanning tunneling microscope

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The schemes of active vibration control combined with theories of mutibody system dynamics and system identification are implemented for the nanometer-scalefor vibration suppression of the scanning tunneling microscope, which is under development at the Max-Planck Institute for State Research in Stuttgart. In the design phase the theories of Flexible Multibody Systems with the consideration of the integration of the piezoelectric elements are used for the modeling and vibration analysis of the mechanical part of the linkage structure, which holds the STM head, and which propagates the internal vibrations to the STM head. For the practical implementation, the methodology of Grey-Box System Identification combined with the model structure from the theories of Flexible Multibody Systems is utilized to obtain a system model based on the experimental data. For the active vibration control, the Integrated Force Feedback (IFF), i. e. a model-free controller, was firstly designed simulated, performed and analyzed with the STM linkage prototype, which shows a good performance locally, while a commonplace performance for the objective vibration suppression. Different model-based controllers basing on the obtained models of the linkage structure are then studied, simulated and analyzed with the STM structure, which could offer more ambitious performance on reducing the objective vibrations.