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Diffusion phenomena in the chemically amplified CARL resist system, Ernst-Christian Steinecke
- Language
- Released
- 2000
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- Title
- Diffusion phenomena in the chemically amplified CARL resist system
- Language
- English
- Authors
- Ernst-Christian Steinecke
- Publisher
- Utz, Wiss.
- Released
- 2000
- ISBN10
- 3896758454
- ISBN13
- 9783896758453
- Series
- Physikalische Chemie
- Category
- University and college textbooks