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Synthesis of compliant single crystal silicon mechanisms with large deformation
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Synthesis of compliant single crystal silicon mechanisms with large deformation, Xiao-Ming Chen
- Language
- Released
- 2009
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- Title
- Synthesis of compliant single crystal silicon mechanisms with large deformation
- Language
- English
- Authors
- Xiao-Ming Chen
- Publisher
- Der Andere Verl.
- Released
- 2009
- Format
- Paperback
- ISBN10
- 3899598989
- ISBN13
- 9783899598988
- Series
- Microactuators - design and technology
- Category
- University and college textbooks