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A dissertation dealing with the low thermal budget requirements of mondern solar cells. An advanced low temperature ITO deposition is demonstrated. Low thermal budget annealing of passivation layer is realized by flash light annealing. Furthermore, fixed charge formation in ALD deposited passivation layers is investigated and controlled.
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Realization and Characterization of Advanced Nanolayers for Photovoltaic Applications, Daniel Simon
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- 2016
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- (Paperback)
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