Micromanufacturing

Foreword; Table of Contents; List of Figures; List of Tables; Executive Summary; 1. Introduction: Richard E. DeVor and Kornel F. Ehmann: Background and Scope; Methodology; Overview of the Report; Format for this Report; Acknowledgements; 2. Design: Martin L. Culpepper and Thomas R. Kurfess; Abstract; The Approach Taken to Assess the State-of-the-Art in NLBMM Design; Unique Requirements for the Design of NLBMM Parts, Processes and Equipment; The Design Process and the Important Elements ofDesign of Y for NLBMM Products; The State-of-the-Art and Gaps between Existing and Required Capabilities; Summary and Conclusions; References; 3. Materials: David Bourell and Kamlakar Rajurkar: Abstract; Materials for Micromanufacturing; Materials Issues in Micromanufacturing; Summary and Conclusions; References; 4. Processes: Kamlakar Rajurkar and Marc Madou: Abstract; Micromanufacturing Processes and Equipment; Micromanufacturing Issues; Summary and Conclusions; References; 5. Metrology, Sensors and Control: Thomas R. Kurfess and Thom J. Hodgson: Abstract; Introduction; Summary and Conclusions; References; 6. Non- lithography Applications: Marc Madou: Abstract; Applications ofNon-lithography Machining; Flexible Manufacturing and Desktop Manufacturing; MEMS Foundry; Summary; References; 7. Business, Education, the Environment, and Other Issues: Thom J. Hodgson: Abstract ; Business; Education; Environment; Government Policies; APPENDICES : A. Panelist Biographies; B. Questionnaire for Site Visits; C. Site Reports-Asia: National Institute ofAdvanced Industrial Science and Technology (AIST); Asia Pacific Microsystems, Inc. (APM); FANUC, FA&Robot; Hitachi Chemical R&D; Center in Tsukuba; ITRI - Mechanical Industry Research Laboratories (MIRL); ITRI - Nano Technology Research Center (NTRC); Instrument Technology Research Center (ITRC); Korean Advanced Institute of Science and Technology (KAIST); Korean Institute ofMachinery and Materials (KJMM); Kyocera Corporation; Kyoto University; Matsuura Machinery Corporation; Metal Industries Research and Development Centre (MTRDC); Mitsubishi Electric Corporation (MEC); Nagoya University - Center for Cooperative Research in Advanced Science; Nagoya University - Laboratory of Structure and Morphology Control; Nagoya University - Department of Micro System Engineering; National Cheng Kung University; National Science Council; National Taiwan University; Olympus Corporate R&D; Center; RIKEN (The Institute of Physical & Chemical Research); Samsung Electro Mechanics Corp., R&D; Center; Sankyo Seiki; Sansyu Finetool Co., Ltd; Seiko Instruments Inc. (511); Seoul National University; University of Electro Communications; University of Tokyo; I. I. S., The University of Tokyo;Yonsei University ; D. Site Reports-Europe: BASELWORLD; Robert Bosch, GmbH; Ecole Polytechnique Fédérale De Lausanne (EPFL); Fraunhofer Institute - Manufacturing Engineering and Automation (IPA); Fraunhofer Institute - Production Systems and Design Technology (IPK); Fraunhofer Institute - Production and Laser Technology (IPT)/(ILT); Fraunhofer Institute - Reliability and Microintegration (IZM); Karlsruhe Research Center; Kiocke Nanotechnik; Kugler GmbH; Laser Zentrum Hamiover e.V; Institut für Mikrotechnik Mainz GmbH (1MM); Philips Center for Industrial Technology (CFT); Swiss Federal Institute ofTechnology - Zurich (ETHZ); Technical University of Eindhoven ; Carl Zeiss Industrielle Messtechnik, GmbH; Zumtobel;E. Glossary.