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This book provides an in-depth analysis of microelectromechanical systems (MEMS) from a mechanical engineering perspective. It explores energy transformation in MEMS, offering tools for modeling and designing microsystems. The work includes analytical and simplified formulas for flexible components and examines actuation/sensing methods with practical examples.
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Mechanics of Microelectromechanical Systems, Ephrahim Garcia, Nicolae Lobontiu
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- Released
- 2004
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- (Hardcover)
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