RF Probe-Induced On-Wafer Measurement Errors in the Millimeter-Wave Frequency Range

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The book delves into the challenges of measuring at millimeter-wave frequencies, particularly focusing on the parasitic effects caused by RF probes that can skew results despite calibration. Through electromagnetic field simulations of integrated circuits combined with RF probe models, the research aims to identify and understand these distortions, ultimately providing solutions to mitigate their impact on measurement accuracy.