The book is currently out of stock
More about the book
Focusing on the latest advancements in optical sensors, the book explores their application in precision nanometrology for measuring angle and displacement. It details scanning-type measuring systems designed for analyzing surface forms and stage motions, complemented by algorithms and experimental data that enhance understanding and implementation.
Book purchase
Precision Nanometrology, Wei Gao
- Language
- Released
- 2014
- product-detail.submit-box.info.binding
- (Paperback)
We’ll notify you via email once we track it down.
Payment methods
- Title
- Precision Nanometrology
- Subtitle
- Sensors and Measuring Systems for Nanomanufacturing
- Language
- English
- Authors
- Wei Gao
- Publisher
- Springer London
- Released
- 2014
- Format
- Paperback
- Pages
- 372
- ISBN13
- 9781447157434
- Category
- Nature in general
- Description
- Focusing on the latest advancements in optical sensors, the book explores their application in precision nanometrology for measuring angle and displacement. It details scanning-type measuring systems designed for analyzing surface forms and stage motions, complemented by algorithms and experimental data that enhance understanding and implementation.