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Ion Beams in Materials Processing and Analysis
Authors
428 pages
More about the book
Focusing on ion beam applications, the book provides foundational knowledge of ion beam physics and technology. It delves into the intricate physics of ion-solid interactions, exploring processes such as ion implantation, ion beam synthesis, sputtering, and nano-patterning. This comprehensive guide serves as a valuable resource for understanding the role of ion beams in contemporary materials research.
Book variant
2012, hardcover
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