The book is currently out of stock
Magnetrons, reactive gases and sputtering
Authors
572 pages
More about the book
Focusing on reactive magnetron sputter deposition, this handbook explores the fundamentals of this physical vapor deposition technique for growing compound thin films. It begins with clear explanations of key concepts and progresses to a more comprehensive model that addresses specific features of the process. The text covers essential aspects of thin film growth, includes illustrative examples, and presents challenges through questions. Additionally, readers have access to an extensive database of material and reactive gas combinations to enhance their understanding.
Book variant
2017, hardcover
Book purchase
We’ll notify you via email once we track it down.