Fabrication of nanoporous silicon

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The study explores the formation of porous silicon layers through silver-enhanced chemical etching, revealing that various concentrations of silver ions, HF, and HNO3, as well as etching duration, significantly influence the characteristics of the porous structure. SEM analysis showed that a specific silver nitrate concentration led to a more uniform porous silicon layer. Impedance data indicated increased Si dissolution with higher acid concentrations. The process proved faster and produced smaller, regular pores compared to traditional methods, with EDX measurements showing no silver residue post-etching.